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Because the temperature resistance of ordinary diamond-like carbon (DLC) coating does not exceed 250 ℃, it can not be used in high temperature occasions. In order to meet the higher temperature working environment, aluminum, Al, silicon, Si and other elements are added to the ordinary SP series diamond-like carbon coating to improve the temperature resistance of the coating. However, other physical properties of the coating, such as surface roughness, will have a certain impact, and it is not suitable for the use of cutting tools. It is suitable for moving parts that need high temperature environment, dry friction or close to dry friction.